Determination of ultratrace elements in semiconductor grade TMAH developer

APPLICATION NOTE 30073 Determination of ultratrace elements in liquid crystal Author Summary Julian D. Wills, Joachim Hinrichs, Thermo Fisher Scientific, Bremen, Germany The Thermo Scientific™ Element 2™ High Resolution ICP-MS is used to determine sub-ng/g levels of metal contaminants in…

APPLICATION NOTE 30009 Analysis of semiconductor grade mineral acids Authors Introduction Julian D. Wills, Joachim Hinrichs, Thermo Fisher Scientific, Bremen, Germany With the continual decrease of geometries used in modern IC (integrated circuit) devices, the trace metal content of process…

APPLICATION NOTE Julian D. Wills, Torsten Lindemann, Thermo Fisher Scientific, Bremen, Germany Key Words Mineral Acids, High Purity Samples, Semiconductor, Sulfuric Acid Goal To demonstrate the ideal suitability of the Thermo Scientific™ ELEMENT 2™ High Resolution (HR) ICP-MS for trace…

Application note | 001007 Elemental analysis Sub-ppt level automated analysis of impurities in nitric acid–hydrogen peroxide solution via HR-ICP-MS Element 2/Element XR High Resolution ICP-MS Authors Introduction B. McKelvey¹, L. Choma¹, J. Roberts², High purity chemicals form the basis for…