APPLICATION NOTE 30072 Determination of ultratrace elements in semiconductor grade TMAH developer Authors Summary Julian D. Wills, Joachim Hinrichs, Thermo Fisher Scientific, Bremen, Germany High-resolution ICP-MS in both hot and cold plasma operating conditions is used to determine sub-ng/g levels…
APPLICATION NOTE Julian D. Wills, Torsten Lindemann, Thermo Fisher Scientific, Bremen, Germany Key Words Mineral Acids, High Purity Samples, Semiconductor, Sulfuric Acid Goal To demonstrate the ideal suitability of the Thermo Scientific™ ELEMENT 2™ High Resolution (HR) ICP-MS for trace…
APPLICATION NOTE 30009 Analysis of semiconductor grade mineral acids Authors Introduction Julian D. Wills, Joachim Hinrichs, Thermo Fisher Scientific, Bremen, Germany With the continual decrease of geometries used in modern IC (integrated circuit) devices, the trace metal content of process…
APPLICATION NOTE No. 30164 Analysis of solar cell silicon Keywords Element GD, glow discharge MS, solar cell, silicon Authors Joachim Hinrichs, Lothar Rottmann, Thermo Fisher Scientific, Bremen, Germany Introduction The increasing demand for alternative energy sources has fuelled significant research…