Sub-ppt level automated analysis of impurities in nitric acid–hydrogen peroxide solution via HR-ICP-MS

APPLICATION NOTE 30009 Analysis of semiconductor grade mineral acids Authors Introduction Julian D. Wills, Joachim Hinrichs, Thermo Fisher Scientific, Bremen, Germany With the continual decrease of geometries used in modern IC (integrated circuit) devices, the trace metal content of process…

APPLICATION NOTE Julian D. Wills, Torsten Lindemann, Thermo Fisher Scientific, Bremen, Germany Key Words Mineral Acids, High Purity Samples, Semiconductor, Sulfuric Acid Goal To demonstrate the ideal suitability of the Thermo Scientific™ ELEMENT 2™ High Resolution (HR) ICP-MS for trace…

APPLICATION NOTE 43176 Routine determination of ultratrace elements in semiconductor grade nitric acid by the Thermo Scientific iCAP RQ ICP-MS Authors Introduction Tomoko Vincent1, Jones Hsu2, Vicki Wu3, Julian Wills1 1 Thermo Fisher Scientific, Bremen, Germany 2 BASF, Taipei, Taiwan…

APPLICATION NOTE 30072 Determination of ultratrace elements in semiconductor grade TMAH developer Authors Summary Julian D. Wills, Joachim Hinrichs, Thermo Fisher Scientific, Bremen, Germany High-resolution ICP-MS in both hot and cold plasma operating conditions is used to determine sub-ng/g levels…