Analysis of As, P dopant distribution of NMOS transistor by FESTEM & EDS

X-ray Microanalysis Family EDS | WDS | EBSD Pathfinder X-ray Microanalysis System Built for speed, built for answers Accelerate your electron microscope analysis with advanced microanalysis software that rapidly presents the elements and chemical phases within your sample. The Pathfinder…

APPLICATION NOTE AN52767 Brake pad analysis for wear characteristics, reverse engineering or failure analysis Author Introduction Dave West, Thermo Fisher Scientific Madison, WI, USA Design and manufacture of automobiles take advantage of the lightweight, strength and energy absorbing qualities of…

Application Note: 31021 Characterization of High-k Dielectric Materials on Silicon Using Angle Resolved XPS Introduction Key Words • Surface Analysis • Chemical State • Distribution of Elements • Film Thickness • Uniformity The decreasing dimensions of transistors in integrated circuits…

Application Note: 51221 The Merits of Quantitative Element Mapping at Low Acceleration Voltage and High Magnification Minoru Suzuki, Thermo Fisher Scientific, Yokohama, Japan Acceleration Voltage and Spatial Resolution Key Words • Energy Dispersive Spectrometry (EDS) • High Spatial Resolution •…