Application Note Semiconductor Multielement Nanoparticle Analysis of Semiconductor Process Chemicals Using spICP-QQQ Characterization of Ag, Fe3O4, Al2O3, Au, and SiO2 NPs in TMAH in a single analytical run Author Yoshinori Shimamura, Donna Hsu, and Michiko Yamanaka Agilent Technologies, Inc. Introduction…
Key words
cps, frequency, nanoparticle, particle, count, normalized, tmah, size, sec, element, intensity, signal, nanoparticles, time, nebulization