Application Note Materials testing and research Spectrophotometric Spatial Profiling of Coated Optical Wafers Efficient handling of large samples and multiple UV-Vis-NIR reflectance measurements using fully automated sample handling Author Travis Burt Fabian Zieschang Agilent Technologies, Inc. Parts of this work…
Key words
wafer, optical, reflection, incidence, polarization, coating, autosampler, incident, angle, uma, beam, patch, mapping, angles, uniformity