Application Note Semiconductor Analysis of Trace Metal Impurities in High Purity Hydrochloric Acid Using ICP-QQQ Authors Kazuo Yamanaka and Kazuhiro Sakai Agilent Technologies, Japan Introduction Hydrochloric acid (HCl) is a component of the standard RCA cleaning process used to remove…
Key words
gas, icp, hcl, qqq, qms, hydrochloric, crc, ions, purity, impurities, cool, becs, mode, omega, determination