Determination of trace elements in ultrapure semiconductor grade sulfuric acid using the Agilent 8900 ICP-QQQ in MS/MS mode Application note Semiconductor Authors Michiko Yamanaka, Kazuo Yamanaka and Naoki Sugiyama, Agilent Technologies, Japan Introduction In the semiconductor industry, it is extremely…
Key words
mode, icp, cell, sulfuric, semiconductor, polyatomic, ion, ions, elements, shift, analyte, product, wafer, mass, avoided