Ultra-low level determination of phosphorus, sulfur, silicon and chlorine using the Agilent 8900 ICP-QQQ Application note Semiconductor Author Kazumi Nakano, Agilent Technologies, Japan Introduction Quadrupole ICP-MS (ICP-QMS) is one of the most sensitive and versatile analytical tools used in inorganic…
Key words
bec, elements, icp, shift, mass, qqq, interferences, cell, ppt, element, mode, lens, omega, difficult, silicon