Direct Measurement of Metallic Impurities in 20% Ammonium Hydroxide by 7700s/7900 ICP-MS Application Note Semiconductor Authors Junichi Takahashi Agilent Technologies Tokyo, Japan Abstract Ammonium hydroxide (NH4OH) is a chemical used in the manufacture of semiconductor devices, and must therefore be…
Key words
cool, ppt, semiconductor, metallic, msa, removal, impurities, becs, gas, wafer, bec, dls, interference, icp, element