Online TOC Measurement for Ultra-pure Water in Semiconductor Industries

Importance of Topic

The manufacturing of semiconductors demands ultra-pure water to prevent contamination that can compromise device performance and yield. Monitoring total organic carbon (TOC) in real time is critical to ensure water quality remains below stringent thresholds.

Objectives and Study Overview

This application examines the Shimadzu TOC-1000e S analyzer, designed for continuous online measurement of TOC in ultra-pure water used in semiconductor production. It highlights the instrument’s capabilities, operational features, and performance during extended monitoring.

Methodology and Instrumentation

The TOC-1000e S employs UV oxidation via a mercury-free excimer lamp emitting 172 nm light integrated with the sample path (Active-Path) to enhance oxidation efficiency and eliminate ozone formation. Organic carbon is converted and quantified by conductivity detection. The compact unit features a large color touch panel, LAN connectivity, and USB data export. Annual maintenance is limited to replacing the lamp and pump head without specialized tools.

Main Results and Discussion

Online measurements were conducted at five-minute intervals over one week, demonstrating stable detection of TOC values below 0.2 µg/L with a detection limit of 0.02 µg/L. Data trends showed consistent performance, confirming the instrument’s high sensitivity and reliability.

Benefits and Practical Applications

• Real-time monitoring of ultra-pure water TOC ensures process control in semiconductor fabs.
• Compact design allows flexible installation on tables, walls, or poles.
• User-friendly touchscreen and remote web interface simplify operation and data review.
• Low maintenance requirements reduce downtime and operational costs.

Future Trends and Potential Applications

Advancements may include integration with IoT platforms for centralized data analytics, AI-driven diagnostics for predictive maintenance, and miniaturized sensor modules for point-of-use monitoring in pharmaceutical and power generation industries.

Conclusion

The Shimadzu TOC-1000e S provides a robust solution for online TOC measurement in ultra-pure water, offering high sensitivity, operational simplicity, and minimal maintenance, thereby supporting stringent water quality control in semiconductor manufacturing.

References

1. Shimadzu Corporation. TOC-1000e S On-Line TOC Analyzer for Ultrapure Water. Application Note 01-01068-EN, November 2025.