Characterization of Silicon Oxide and Oxynitride Layers

Application Note: 31014 Angle Resolved XPS Introduction Key Words • Surface Analysis • Depth Profiles • Thickness Measurement • Relative Depth Plots Using angle resolved XPS (ARXPS), it is possible to characterize ultra-thin films without sputtering. In most cases, ARXPS…

Application Note: 31021 Characterization of High-k Dielectric Materials on Silicon Using Angle Resolved XPS Introduction Key Words • Surface Analysis • Chemical State • Distribution of Elements • Film Thickness • Uniformity The decreasing dimensions of transistors in integrated circuits…

Application Note: 31055 Theta Probe: Small Spot XPS Spectrometer with Parallel ARXPS Capability Description Key Words • Parallel ARXPS • Surface Analysis • Ultra-thin Films The Thermo Scientific Theta Probe, Figure 1, is a highperformance XPS instrument. Our patented Theta…

Application Note: 31070 Characterization of Chemical Gradients and Antibody Immobilization Using XPS and ARXPS Introduction Key Words • Surface Analysis • Angle Resolved XPS • Chemical Gradients Chemical gradients are regions of change in surface chemistry between two points on…