Errors Associated With Thin Film Measurements Using XPS at a Single Angle

Application Note: 31014 Angle Resolved XPS Introduction Key Words • Surface Analysis • Depth Profiles • Thickness Measurement • Relative Depth Plots Using angle resolved XPS (ARXPS), it is possible to characterize ultra-thin films without sputtering. In most cases, ARXPS…

Application Note: 31055 Theta Probe: Small Spot XPS Spectrometer with Parallel ARXPS Capability Description Key Words • Parallel ARXPS • Surface Analysis • Ultra-thin Films The Thermo Scientific Theta Probe, Figure 1, is a highperformance XPS instrument. Our patented Theta…

Application Note: 31052 Key Words • Surface Analysis • ARXPS at Each Point on Linescan • Automated Small Area Analysis • Routine Measurement of Thin Films • Measurement of Large Samples The Karlsruhe Micro Nose, KAMINA The growing demand for…

Application Note: 31004 Key Words • Surface Analysis • Angle Calibration • Angular Linearity • Angular Resolution Angular Linearity and Resolution on Theta Probe The unique feature of Thermo Scientific Theta Probe is its ability to make angle resolved XPS…