Composition, coverage and band gap analysis of ALD-grown ultra thin films

APPLICATION NOTE Multi-technique composition, coverage and band gap analysis of ALD-grown ultra thin films Building on the success of the Thermo Scientific™ K-Alpha XPS System, the Thermo Scientific Nexsa XPS System adds the capability of multi-technique analysis to the already…

Application Note: 31021 Characterization of High-k Dielectric Materials on Silicon Using Angle Resolved XPS Introduction Key Words • Surface Analysis • Chemical State • Distribution of Elements • Film Thickness • Uniformity The decreasing dimensions of transistors in integrated circuits…

Nexsa Surface Analysis System High-performance XPS with multi-technique integration Confident analysis Surface and interface analysis can be challenging. It requires instrumentation that can deliver results with confidence to inform the next steps. The Thermo Scientific™ Nexsa™ Surface Analysis System is…

Instrumentation for surface analysis Surface chemistry and thin film characterization X-ray photoelectron spectroscopy Quantitative, chemical identification of the surface X-ray Photoelectron Spectroscopy (XPS, also known as Electron Spectroscopy for Chemical Analysis – ESCA) is a highly surface-sensitive, quantitative, chemical analysis…