Application Note Semiconductor Determination of Trace Impurities in Electronic Grade Arsine by GC-ICP-QQQ Sub-ppb detection limits for hydride gas contaminants using a single column, single injection volume, and multi-tune method Authors Introduction William M. Geiger, Blake McElmurry, Jesus Anguiano1 Mark…
Key words
germane, arsine, phosphine, silane, sulfide, icp, gas, hydrogen, hydride, integration, dopants, qqq, time, gallium, standard