Application Note 85 Determination of Trace Anions in Organic Solvents INTRODUCTION EQUIPMENT In the manufacture of semiconductor materials, a great deal of attention is focused on minimizing sources of contamination. Yield and reliability can be significantly compromised by ionic contamination.…
Key words
dxp, anions, sample, concentrator, loop, solvents, trace, pump, loading, organic, eluent, waste, valve, minutes, deionized