The Agilent TURBO-V301 Navigator is a high-performance turbomolecular pump system engineered for demanding high-vacuum applications in scientific research and industry. Designed with Varian’s innovative MacroTorr® drag stages and a compact monolithic rotor, the V301 delivers exceptional pumping speed, compression ratio, and foreline tolerance — all in a compact, lightweight form factor.
This pump is equipped with the versatile Navigator Controller, which enables seamless integration into laboratory and industrial setups. It supports remote diagnostics and control through a user-friendly Windows™ interface, allowing real-time monitoring, diagnostics, and plug-and-play operation.
Optimized for clean, oil-free vacuum generation, the TURBO-V301 is ideal for analytical instrumentation such as GC/MS and LC/MS systems, electron and ion microscopy, semiconductor manufacturing, and a wide range of ultra-high vacuum (UHV) and high-throughput environments.
Key Features
- Pumping Speed: 250–280 L/s for nitrogen
- High Compression Ratio: 7 × 10⁸ (N₂), 10⁵ (He), 10⁴ (H₂)
- Clean Operation: Oil-free, maintenance-free ceramic bearings with proprietary dry lubrication
- Foreline Tolerance: Operates at foreline pressures up to 18 mbar with dry scroll or mechanical pumps
- Controller Integration: Navigator controller supports 24 VDC or 120/220 VAC, with plug-and-play functionality and software connectivity
- Cooling Options: Natural air convection, with optional forced air or water cooling
- Mounting Flexibility: Operates in any orientation (vertical, horizontal, upside down)
Typical Applications
- Mass spectrometry (GC/MS, LC/MS, TOF, ICP-MS)
- Electron and ion microscopy (SEM, TEM, FIB)
- Surface science and metrology
- Semiconductor process tools
- High energy physics and fusion research
- Vacuum load locks and analytical instrumentation
Technical Specifications
- Part Number: 2732067800
- Model: Turbo-V 301 Navigator
- Pumping Speed:
- N₂: 250–280 L/s
- He: 220–230 L/s
- H₂: 200–210 L/s
- Compression Ratio:
- N₂: 7 × 10⁸
- He: 1 × 10⁵
- H₂: 1 × 10⁴
- Ultimate Pressure:
- With mechanical pump: < 5 × 10⁻¹⁰ mbar
- With dry pump: < 5 × 10⁻⁹ mbar
- Rotational Speed: 56,000 rpm
- Startup Time: < 3 minutes
- Inlet Flange Options: ISO 100 / ISO 160 or CF 6" / CF 8"
- Foreline Flange: KF16 (optional KF25)
- Cooling: Natural convection standard, optional air/water cooling
- Operating Position: Any
- Bakeout Temperature:
- CF flange: 120 °C
- ISO flange: 80 °C
- Vibration Level: < 0.01 µm displacement at inlet
- Weight:
- Pump + Navigator controller (ISO): 4.5 kg
- Pump + Navigator controller (CF): 8 kg
