The determination of thin film thickness using reflectance spectroscopy

Low reflectance measurements using the ‘VW’ technique Application Note Author Introduction Andrew R. Hind PhD and Caroline Perier Thin film anti-reflection (AR) coatings are designed to greatly reduce the light loss through the utilization of phase changes and the dependence…

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Application Note Materials Evaluation of the Cary Absolute Specular Reflectance Accessory for the Measurement of Optical Constants of Thin Films Author Stuart White Physics Department, Sydney University, Sydney, New South Wales Abstract The optical constants of thin absorbing films can…

The deep ultraviolet spectroscopic properties of a next-generation photoresist Application Note Author Abstract Andrew R. Hind PhD and Rina Soebekti The deep UV spectroscopic properties of a next-generation photoresist material have been investigated using a Cary Deep UV spectrophotometer equipped…