The deep ultraviolet spectroscopic properties of a next-generation photoresist

The characterization of optical components using the Cary Deep UV spectrophotometer and ‘VW’ specular reflectance accessory Application Note Author Andrew R. Hind PhD Abstract Agilent Technologies, Inc. Deep UV spectra of magnesium fluoride coated optical components have been acquired using…

The determination of thin film thickness using reflectance spectroscopy Application Note Author Abstract Andrew R. Hind PhD* and Lisette Chomette** The reflectance spectrum of a coated polycarbonate sample was used to determine the film thickness of a polymeric coating. Absolute…

Low reflectance measurements using the ‘VW’ technique Application Note Author Introduction Andrew R. Hind PhD and Caroline Perier Thin film anti-reflection (AR) coatings are designed to greatly reduce the light loss through the utilization of phase changes and the dependence…

Application Note Materials Evaluation of the Cary Absolute Specular Reflectance Accessory for the Measurement of Optical Constants of Thin Films Author Stuart White Physics Department, Sydney University, Sydney, New South Wales Abstract The optical constants of thin absorbing films can…