Using ICP-MS/MS with M-Lens for the analysis of high silicon matrix samples

Applications of ICP-MS Measuring Inorganic Impurities in Semiconductor Manufacturing Application Compendium > Return to table of contents > Search entire document Table of contents ICP-MS and ICP-QQQ in the Semiconductor Industry 4 Agilent Has Three Decades of ICP-MS Experience Driving…

Poster Reprint ASMS 2020 MP 176 Using ICP-MS/MS with M-Lens for the analysis of high silicon matrix samples Yu Ying1; Xiangcheng Zeng1 1Agilent China Technologies, China, Shanghai, Introduction The expansion of the connected devices and the Internet of Things (IoT)…

Application Note Semiconductor Determination of Ultratrace Impurities in Semiconductor Photoresist Using ICP-MS/MS Monitoring 20 elemental contaminants in IC photoresist by Agilent 8900 ICP-QQQ after simple dilution in PGMEA solvent Authors Introduction Yu Ying, Xiangcheng Zeng, Juane Song With the rapid…

5th Edition Handbook of ICP-QQQ Applications using the Agilent 8800 and 8900 Primer > Return to table of contents > Search entire document Foreword Agilent Technologies launched its 8800 Triple Quadrupole ICP-MS (ICP-QQQ) at the 2012 Winter Conference on Plasma…