Determination of Ultratrace Impurities in Semiconductor Photoresist Using ICP-MS/MS

Applications of ICP-MS Measuring Inorganic Impurities in Semiconductor Manufacturing Application Compendium > Return to table of contents > Search entire document Table of contents ICP-MS and ICP-QQQ in the Semiconductor Industry 4 Agilent Has Three Decades of ICP-MS Experience Driving…

APPLICATION NOTE 43374 Determination of ultratrace elements in photoresist solvents using the Thermo Scientific iCAP TQs ICP-MS Authors Introduction Tomoko Vincent, Product Specialist, Thermo Fisher Scientific Propylene glycol methyl ether acetate (PGMEA) and N-methyl-2-pyrrolidone (NMP) are the base organic solvents…

Application Note Semiconductor Ultrapure Process Chemicals Analysis by ICP-QQQ with Hot Plasma Conditions Meeting single- and sub-ppt guideline levels for ASTM/SEMI elements in ultrapure water using an Agilent 8900 ICP-QQQ Authors Kazuhiro Sakai and Yoshinori Shimamura Agilent Technologies, Inc. Introduction…

5th Edition Handbook of ICP-QQQ Applications using the Agilent 8800 and 8900 Primer > Return to table of contents > Search entire document Foreword Agilent Technologies launched its 8800 Triple Quadrupole ICP-MS (ICP-QQQ) at the 2012 Winter Conference on Plasma…