Sub-ppb detection limits for hydride gas contaminants using GC-ICP-QQQ Application note Semiconductor and petrochemical Authors William Geiger CONSCI, Ltd., Pasadena, Texas, USA Emmett Soffey, Steve Wilbur and Chris Scanlon Agilent Technologies Inc., USA Introduction Hydride gases, such as phosphine and…
Klíčová slova
sulfide, icp, ppb, qqq, gas, carbonyl, cell, phosphine, silane, cos, omega, hydride, using, semiconductor, exit