8900 Applications from the field of Semiconductor Analysis focused on Laser ablation - page 1

Open paper Direct Analysis of Metallic Impurities in SiC and GaN Wafers by LA-GED-MSAG-ICP-MS/MS

Direct Analysis of Metallic Impurities in SiC and GaN Wafers by LA-GED-MSAG-ICP-MS/MS

ICP/MS, ICP/MS/MS, Laser ablation
Instrumentation
ICP/MS, ICP/MS/MS, Laser ablation
Manufacturer
Agilent Technologies
Industries
Semiconductor Analysis