Christopher Deeks, Paul Mack, Thermo Fisher Scientific, East Grinstead, UK Appli cat i on N ote 5 2 6 0 6 Cleaning Metal Oxides Using Argon Cluster Ions to Prevent Surface Modification Key Words XPS, MAGCIS, Argon Clusters, Cleaning, Metal…
Klíčová slova
cleaning, cluster, xps, monatomic, received, magcis, sputter, surface, taken, ion, cleaned, argon, clustercleaned, survey, alpha