Characterization of High-k Dielectric Materials on Silicon Using Angle Resolved XPS

Application Note: 31014 Angle Resolved XPS Introduction Key Words • Surface Analysis • Depth Profiles • Thickness Measurement • Relative Depth Plots Using angle resolved XPS (ARXPS), it is possible to characterize ultra-thin films without sputtering. In most cases, ARXPS…

Application Note: 31055 Theta Probe: Small Spot XPS Spectrometer with Parallel ARXPS Capability Description Key Words • Parallel ARXPS • Surface Analysis • Ultra-thin Films The Thermo Scientific Theta Probe, Figure 1, is a highperformance XPS instrument. Our patented Theta…

Application Note: 31025 Characterization of Silicon Oxide and Oxynitride Layers Introduction Key Words • Surface Analysis • Chemical State • Distribution • Dose • Film Thickness • Uniformity Thermo Scientific Theta Probe and Theta 300 have been used to characterize…

APPLICATION NOTE Multi-technique composition, coverage and band gap analysis of ALD-grown ultra thin films Building on the success of the Thermo Scientific™ K-Alpha XPS System, the Thermo Scientific Nexsa XPS System adds the capability of multi-technique analysis to the already…