Angle Resolved XPS

Application Note: 31055 Theta Probe: Small Spot XPS Spectrometer with Parallel ARXPS Capability Description Key Words • Parallel ARXPS • Surface Analysis • Ultra-thin Films The Thermo Scientific Theta Probe, Figure 1, is a highperformance XPS instrument. Our patented Theta…

Application Note: 31021 Characterization of High-k Dielectric Materials on Silicon Using Angle Resolved XPS Introduction Key Words • Surface Analysis • Chemical State • Distribution of Elements • Film Thickness • Uniformity The decreasing dimensions of transistors in integrated circuits…

Application Note: 31016 Key Words • Surface Analysis • Elastic Scattering • Need for Angle Resolved Measurements Errors Associated With Thin Film Measurements Using XPS at a Single Angle Background Single Angle Measurements Thermo Scientific Theta Probe and Theta 300…

Application Note: 31070 Characterization of Chemical Gradients and Antibody Immobilization Using XPS and ARXPS Introduction Key Words • Surface Analysis • Angle Resolved XPS • Chemical Gradients Chemical gradients are regions of change in surface chemistry between two points on…