Direct Measurement of Metallic Impurities in 20% Ammonium Hydroxide by 7700s/7900 ICP-MS Application Note Semiconductor Authors Junichi Takahashi Agilent Technologies Tokyo, Japan Abstract Ammonium hydroxide (NH4OH) is a chemical used in the manufacture of semiconductor devices, and must therefore be…
Klíčová slova
cool, ppt, metallic, semiconductor, msa, removal, becs, impurities, gas, wafer, bec, dls, icp, interference, element