AN-PAN-1055 Monitoring quality parameters in standard cleaning baths Measure ammonium hydroxide, simultaneously with inline analysis hydrogen peroxide, and hydrochloric acid Summary Silicon semiconductor devices are manufactured on highly polished wafers. Scratches and other imperfections on the wafer could affect the…
Klíčová slova
metrohm, cleanroom, cleaning, process, baths, wafer, nirs, real, wet, subfab, inline, hcl, bench, singlefiber, singlepoint