APPLICATION NOTE 30009 Analysis of semiconductor grade mineral acids Authors Introduction Julian D. Wills, Joachim Hinrichs, Thermo Fisher Scientific, Bremen, Germany With the continual decrease of geometries used in modern IC (integrated circuit) devices, the trace metal content of process…
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isotope, plasma, pfa, bec, semiconductor, interferences, cold, background, spike, lod, icp, manufacture, resolution, mineral, hot