APPLICATION NOTE 43359 Determination of ultratrace elements on silicon wafer surfaces using the Thermo Scientific iCAP TQs ICP-MS Authors Introduction Tomoko Vincent, Product Specialist, Thermo Fisher Scientific With the continual decrease in device geometries, the maximum allowable trace metallic impurity…
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ked, tqs, wafer, vpd, icap, cold, icp, silicon, scientific, ultratrace, pfa, thermo, modes, semiconductor, concentrations