Environmental Applications Whole Air Canister Sampling and Preconcentration GC-MS Analysis for pptv Levels of Trimethylsilanol in Semiconductor Cleanroom Air By Jason S. Herrington, Ph.D. Abstract The costly damage trimethylsilanol (TMS) in cleanrooms exacts on scanner lenses in the semiconductor industry…
Klíčová slova
trimethylsilanol, timeout, time, pptv, measurements, adl, replicate, desorb, standard, blanks, flow, purge, flush, canister, bfb